 |
|
Glossary
|
- S
- sulfur
- SA
- surface area; subresolution assist; structured analysis
- S/A
- sensor/actuator
- SAA
- static automated analysis
- SAB
- sensor/actuator bus
- SAE
- Society of Automotive Engineers
- SAM
- scanning auger microscopy
- SAT
- spray acid tool
- SAW
- surface-acoustic wave
- Sb
- antimony
- SB
- strong base ion exchange
- Sc
- scandium
- SC1
- Standard Clean 1
- SC2
- Standard Clean 2
- SCA
- surface charge analysis
- SCALE
- SEMATECH Cell Application Learning Environment
- SCBA
- self-contained breathing apparatus
- SCC
- strategic cell controller
- SCCS
- source code control system
- SCE
- saturated calomel electrode
- SCF
- super critical fluid
- SCI
- surface charge imaging
- SCIC
- semiconductor integrated circuit
- SCM
- scanning capacitance microscopy
- SCOE
- SEMATECH Center of Excellence
- SCP
- single chip package
- SCR
- silicon controlled rectifier
- SD
- small dual in-line package; structured design
- S/D
- source/drain
- SDFL
- Schottky-diode FET logic
- SDLC
- synchronous data link control
- SDM
- Specific Device Model for SAB
- SDS
- smart distributed system
- SDSI
- synchronous data-link control
- Se
- selenium
- SE
- spectroscopic ellipsometry; secondary electron
- SEAJ
- Semiconductor Equipment Association of Japan
- SEC
- size exclusion chromatography
- SECS
- Semiconductor Equipment Communications Standard
- SEG
- selective epitaxial growth
- SEIM
- software engineering improvement method
- SEM
- scanning electron microscopy; specific equipment model
- SEMI
- Semiconductor Equipment and Materials International
- SemiSPIN
- Semiconductor Software Process Improvement Network
- SEP
- software engineering process
- SEPG
- Software Engineering Process Group
- SEQDB
- Semiconductor Equipment Database
- SETEC
- Semiconductor Equipment Technology Center
- SFC
- supercritical fluid chromatography
- SFCS
- shop floor control system
- SFCS I/F
- shop floor control system interface
- SGML
- Standard Generalized Markup Language
- SGMM
- Semiconductor Generic Manufacturing Model
- SGMRS
- Semiconductor Generic Manufacturing Requirements Specification
- Si
- silicon
- SIA
- Semiconductor Industry Association
- SIDP
- sputter ion depth profiling
- SIL
- Systems Integration Lab (was ATF)
- SIMO
- single input, multi output
- SIMOX
- separation by implantation of oxygen
- SIMS
- secondary ion mass spectroscopy
- SIP
- SEMATECH Internal Program
- SIRIJ
- Semiconductor Industry Research Institute of Japan
- SISO
- single input, single output
- SIV
- sensors in vacuum
- SL
- specification limit
- SLAM
- scanning laser acoustic microscopy; single layer alumina metallization
- SLC
- surface laminar circuit
- SLOC
- source lines of code
- SLSI
- super large scale integration
- Sm
- samarium
- SM
- stress migration
- SMB
- single-mask bumping
- SMC
- surface-mounted components
- SME
- subject matter expert; software maintenance engineer
- SMG
- screen management guide
- SMIF
- standard mechanical interface
- SMPM
- SECS message protocol machine
- SMR
- semiconductor mask representation
- SMS
- SECS message service
- SMTS
- Strategic Material Transport System
- s/n
- serial number
- S/N
- signal-to-noise
- Sn
- tin
- SNMS
- sputtered neutral mass spectroscopy
- SNOM
- scanning nearfield optical microscopy
- SNR
- signal-to-noise ratio
- SO
- small outline (package)
- SOD
- spin-on-dielectric
- SODAS
- SEMATECH Organized Damage Analysis Software
- SOG
- spin-on glass
- SOI
- silicon on insulator
- SOIC
- small outline integrated circuit
- SOM
- scanning optical microscopy; sulfuric acid-ozone mixture
- SOP
- standard operating procedure
- SOS
- silicon on sapphire
- SOW
- statement of work
- SPC
- statistical process control
- SPI
- Software Process Improvement
- SPICE
- simulation program with integrated circuit emphasis
- SPIDER
- SEMATECH Process Induced Damage Effect Revealer
- SPIDER-MEM
- SPIDER-Manufacturing Equipment Monitor
- SPIN
- Software Process Improvement Network
- SPM
- scanning probe microscopy
- SPP
- single-phase printing
- SPR
- semiconductor process representation
- SPS
- surface preparation system
- SPT
- shortest processing time
- SPV
- surface photo voltage
- SQC
- statistical quality control
- SQL
- Structured Query Language
- SQPMM
- Software Quality and Process Maturity Model
- Sr
- strontium
- SRAC
- Supplier Relations Action Council
- SRAM
- static random access memory
- SRC
- Semiconductor Research Corporation
- SRP
- spreading resistance probe
- SRPT
- shortest remaining processing time
- SRS
- software requirements specification
- SSA
- Semiconductor Industry Association
- SSE
- sum squared error
- SSEM
- Stepper Specific Equipment Model
- SSI
- small scale integration
- SSM
- strategic sourcing methodology
- SSQA
- Standardized Supplier Quality Assessment
- SSRL
- SEMATECH Software Reuse Library
- SSRP
- SEMATECH Software Reuse Program
- STAR
- simultaneous transmitted and reflected
- STEL
- short-term exposure limit
- STEM
- scanning transmission electron microscope/microscopy
- STM
- scanning tunneling microscopy
- STP
- standard temperature and pressure; system test plan
- SU
- subresolution attenuated
- SUT
- system under test
- SVD
- singular value decomposition
- SWAT
- Software Action Team
- SWEAT
- standard wafer-level electromigration accelerated test
- SWI
- static walkthrough/inspection
- SWIM
- Semiconductor Workbench for Integrated Modeling
- SWP
- single wafer processing
- SWR
- semiconductor wafer representation
- SWV
- square wave voltammetry
|
|
 |
|
