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Glossary
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- R2R
- run-to-run
- Ra
- radium
- RAC
- remote access and control
- RAE
- residue after evaporation
- RAIRS
- reflection-absorption infrared spectroscopy
- RAM
- random access memory; reliability, availability, and maintainability
- RAMP
- Reliability Analysis and Modeling Program
- Rb
- rubidium
- RBB
- base sheet resistance
- RBS
- refractive backscattering; Rutherford backscattering spectroscopy
- RCS
- revision control system
- RCT
- reference cluster tool
- RCWA
- rigorous coupled wave analysis
- RDR
- rotating disk reactor
- Re
- rhenium
- REL
- recommended exposure limit
- RESSFOX
- recessed sealed sidewall field oxidation
- RF
- radio frequency; resonance frequency
- RFI
- request for information; radio frequency interference
- RFM
- radio frequency monitoring
- RFO
- restricted flow orifice
- RFP
- request for plan; request for proposal; radio frequency probe
- RFQ
- request for quote
- RGA
- residual gas analysis
- RGV
- rail guided vehicle
- RH
- relative humidity
- Rh
- rhodium
- RH
- relative humidity
- RI
- reliability improvement
- RIE
- reactive ion etch
- RIM
- read-in mode
- RISC
- reduced instruction set computer/computing
- RIST
- rule induction and statistical testing
- RLI
- resist lithography
- RMI
- remote method invocation
- RMOS
- refractory metal-oxide semiconductor
- RMS
- root mean square; Recipe Management Standard
- RMSEP
- root mean square error of prediction
- RMTF
- Recipe Management Task Force
- Rn
- radon
- RNN
- recurrent neural network
- RO
- reverse osmosis
- ROC
- remote object communications
- ROE
- return on equity
- ROI
- return on investment
- ROM
- read-only memory
- ROX
- run of experiments
- RPC
- remote procedure call
- RQ
- reportable quantity
- RR
- removal rate
- RRMSEP
- relative root mean square error of prediction
- RSE
- reactive sputter etch
- RSM
- response surface methodology; response surface matrix
- RT
- room temperature
- RTA
- rapid thermal anneal
- RTB
- real-time backplane
- RTCVD
- rapid thermal chemical vapor deposition
- RTD
- resistance temperature detector
- RTL
- resistor-transistor logic; register transfer level
- RTM
- rapid thermal multiprocessing
- RTO
- rapid thermal oxidation; regenerative thermal oxidizer
- RTP
- rapid thermal processing (or processor)
- RTR
- real-time reporting
- RTS
- request to send
- RTSPC
- real-time statistical process control
- RTV
- room temperature vulcanizing
- RTW
- room temperature vulcanizing
- RTY
- retry limit
- Ru
- ruthenium
- RZ
- return to zero
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