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Glossary
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- P
- phosphorous
- Pa
- protactinium
- PAC
- photoactive compound
- PACVD
- plasma-assisted chemical vapor deposition
- PA-FTIR
- photoacoustic Fourier transform infrared spectroscopy
- PAL
- process automation language; programmable array logic; process asset
library
- PAM
- process application module
- PAS
- photoacoustic spectroscopy
- PAT
- Process Action Team
- PAWS
- portable acoustic wave sensor
- Pb
- lead
- PBET
- performance-based equipment training
- PBGA
- plastic ball grid array
- PBL
- poly-buffered LOCOS
- PBS
- photon backscattering
- PC
- personal computer; programmable controller; process control
- PCAD
- packaging computer-aided design
- PCB
- printed circuit board
- PCM
- pulse-code modulation
- PCO
- photocatalytic oxidation
- PCMP
- post chemical-mechanical polishing
- PCMS
- Plasma Chemistry Monte-Carlo Simulation
- PCR
- principle component regression
- PCS
- production cost savings
- PCT
- Process Change Teams
- Pd
- palladium
- PDA
- personal digital assistants
- PDC
- passive data collection
- PDF
- portable document format
- PDSA
- peroxydisulfuric acid
- PDU
- protocol data unit
- PDVC
- phase-dependent voltage contrast
- PEB
- post exposure bake
- PECVD
- plasma-enhanced chemical vapor deposition
- PEDS
- plasma-enhanced deposition system
- PEELS
- parallel electron energy loss spectrometry
- PEL
- permissible exposure level
- PERT
- program evaluation review technique
- PES
- photoelectron spectroscopy
- PET
- post-etch treatment
- PETEOS
- plasma-enhanced tetraethylosilicate
- PFA
- perfluoroalkoxy
- PFC
- perfluorocompound; perfluorocarbon
- PFPE
- perfluorinated polyether
- PFR
- plug-flow reactor
- PfTQ
- Partnering for Total Quality
- PGA
- pin grid array
- PGI
- purge gas inlet
- P-GILD
- projection gas immersion laser doping
- PGV
- person guided vehicle
- PI
- proportional integral
- PID
- proportional integral derivative; process-induced defect
- PIII
- plasma immersion ion implantation
- PIND
- particle impact noise detection
- PIP
- process-induced particles
- PIV
- peak inverse voltage; post indicator valve
- PLA
- programmable logic array
- PLC
- programmable logic controller
- PLCC
- plastic leaded chip carrier
- PLL
- plasma lockload
- PLS
- partial least squares; projection of latent structures
- PLY
- photolimited yield
- Pm
- promethium
- PM
- preventive maintenance; process module
- PMC
- process module controller
- PMCC
- Pensky-Martens closed cup
- PMI
- phase measuring interferometer
- PMMA
- polymethyl methacrylate
- PMOS
- positive channel metal-oxide semiconductor
- PMS
- particle measuring system
- PMT
- photomultiplier tube
- PMTF
- Product Management Task Force
- Po
- polonium
- POR
- process-of-record
- POSIX
- portable operating system interface for computing environments
- POU
- point-of-use
- POUCG
- point-of-use chemical generation
- PPE
- personal protective equipment
- PPGA
- plastic pin grid array
- PPID
- process program identification
- PPPL
- Princeton Plasma Phisics Laboratory
- PPRef
- process program reference
- PQFP
- plastic quad flat pack
- PRAS
- particle reactor analysis services
- Pr
- praseodymium
- PRAT
- production reliability acceptance test
- PRB
- pseudo-random binary
- PRBS
- pseudo-random binary sequences
- PRESS
- prediction error sum of squares
- PROM
- programmable read-only memory
- PRSC
- parametric response surface control
- PRV
- person rail guided vehicle
- PS
- porous silicon
- PSB
- phase shifting blank
- PSC
- porous silicon capacitor
- PSD
- power spectral density; port status display
- PSG
- phosphosilicate glass
- PSII
- plasma source ion implantation
- PSL
- polystyrene latex
- PSLS
- polystyrene latex sphere
- PSM
- phase shifting mask; phase shift mask
- PSR
- perfectly stirred reactor
- Pt
- platinum
- PTAB
- Project Technical Advisory Board
- PTC
- pre- and post-process treatment chambers
- PTFE
- polytetrafluorethylene
- Pu
- plutonium
- PVA
- poly vinyl acetate
- PVC
- polyvinylchloride
- PVD
- physical vapor deposition
- PVDF
- polyvinylidene fluoride
- PWB
- printed wiring board
- PWP
- particles per wafer pass
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