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Glossary
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- M
- million
- MACT
- maximum achievable control technology
- MALDI
- matrix-assisted laser desorption and ionization
- MAN
- metropolitan area network
- MAP
- manufacturing automation protocol
- MAWP
- maximum allowable working pressure
- MB
- machine batch
- MBC
- machine bath collection
- MBE
- molecular beam epitaxy
- MBMS
- mocecular beam mass spectrometry
- MBPC
- model-based process control
- MBTC
- model-based temperature control
- MBX
- message bus exchange
- MCA
- measurement capability analysis
- MCBA
- mean cycles between assists
- MCBF
- mean cycles between failures
- MCBI
- mean cycles between interrupts
- MCBSE
- mean cycles between scrap event
- MCM
- multichip module ; manufacturing cycle management
- MCP
- multichip package
- MCS
- material control system
- MCT
- mercury cadmium telluride detector
- MCU
- microprocessor control unit; mobile calibration unit
- MCVD
- metal chemical vapor deposition
- Md
- mendelevium
- MD
- molecular dynamics
- MDC
- mechanical dry cycle
- MD-MOS
- multi-drain metal-oxide semiconductor
- MDL
- minimum detection limit; Master Deliverables List
- MDQ
- market driven quality
- MDS
- modify device status
- MDU
- modular dispensing unit
- MEBS
- medium energy backscattering spectrometry
- MED
- modeling for equipment design
- MEM
- Manufacturing Enterprise Model; Manufacturing Equipment Monitor
- MERIE
- magnetically enhanced reactive ion etching
- MES
- manufacturing execution systems
- MESC
- Modular Equipment Standards Committee (SEMI); Modular Equipment
Sub-Committee for Communications (SEMI--after 1992)
- MESFET
- metal-semiconductor field effect transistor
- METL
- multielement two-layer
- METS
- Materials and Equipment Trading Service
- MeV
- megaelectrovolt
- MFC
- mass flow controller
- MFM
- mass flow meter
- Mg
- magnesium
- MG
- manufactured goods
- MGC
- manufactured goods collection
- MGE
- modulator generalized ellipsometry
- MHI
- material hazard index
- MHz
- megahertz
- MIC
- monolithic integrated circuit
- MID
- material ID
- MIE
- magnetron ion etching
- MIM
- metal-insulator-metal
- MIMAC
- measurement and improvement of manufacturing capacity
- MIMD
- management information of metrology data
- MIMO
- multi-input, multi-output
- MIS
- metal insulator silicon
- MLCC
- multilayer ceramic capacitors
- MLL
- modify lot location
- MLM
- multilevel metal
- MLP
- multi-layer perceptron
- MLR
- message log report
- MLV
- modify logging versions
- MM
- Manufacturing Methods
- MMC
- Manufacturing Methods Council
- MMD
- Microlithographic Mask Development program
- MMIC
- monolithic microwave integrated circuit
- MMM
- material movement management
- MMMC
- machine material movement component
- MMMS
- Material Movement Management Standard
- MMO
- multimodel optimization
- MMOS
- modified MOS
- MMST
- Microelectronics Manufacturing Science and Technology
- Mn
- manganese
- MNOS
- metal-nitride-oxide semiconductor
- MNS
- metal-nitride semiconductor
- Mo
- molybdenum
- MO
- metal-organic
- MOCVD
- metal-organic chemical vapor deposition
- MOP
- modify operating procedures
- MOS
- metal-oxide semiconductor
- MOS-C
- metal oxide semiconductor capacitor
- MOSFET
- metal-oxide semiconductor field effect transistor
- mp
- melting point
- MP
- massively parallel
- MP-OES
- multi-point optical emission spectroscopy
- MPP
- multiphase printing
- MPRES
- modular plasma reactor simulator
- MPU
- microprocessor unit
- MPX
- multiplex
- MRP
- materials requirements planning
- MRP-II
- manufacturing resource planning
- MRS
- Materials Research Society
- MS
- mass spectrometry; mass spectrometer; mass spectroscopy
- MSB
- most significant bit
- MSDS
- Material Safety Data Sheet
- MSHA
- Mine Safety and Health Administration
- MSEM
- Metrology Specific Equipment Model
- MSG
- Management Steering Group
- MSI
- medium-scale integration; manufacturing support item
- MSID
- mass spectrometer lead detector
- MSL
- modify system logging
- MSLD
- mass spectromenter leak detector
- MSS
- modify system state
- MSTAB
- Manufacturing Systems Technical Advisory Board
- MTBA
- mean time between assists
- MTBAp
- mean (productive) time between assists
- MTBF
- mean time between failures
- MTBFp
- mean (productive) time between failures
- MTBI
- mean time between interrupt; mean time between incident
- MTOL
- mean time off line; mean time on line
- MTS
- Material Tracking Standard
- MTTA
- mean time to assist
- MTTC
- mean time to correct
- MTTF
- mean time to failure
- MTTR
- mean time to repair
- MUL
- modify user login
- MUP
- modify user password
- MV
- megavolt
- MVC
- model view controller
- MVTR
- moisture vapor transmission rate
- MW
- molecular weight
- MWBC
- mean wafers between cleans
- MWT
- monitor wafer turner
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