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Glossary

M
million
MACT
maximum achievable control technology
MALDI
matrix-assisted laser desorption and ionization
MAN
metropolitan area network
MAP
manufacturing automation protocol
MAWP
maximum allowable working pressure
MB
machine batch
MBC
machine bath collection
MBE
molecular beam epitaxy
MBMS
mocecular beam mass spectrometry
MBPC
model-based process control
MBTC
model-based temperature control
MBX
message bus exchange
MCA
measurement capability analysis
MCBA
mean cycles between assists
MCBF
mean cycles between failures
MCBI
mean cycles between interrupts
MCBSE
mean cycles between scrap event
MCM
multichip module ; manufacturing cycle management
MCP
multichip package
MCS
material control system
MCT
mercury cadmium telluride detector
MCU
microprocessor control unit; mobile calibration unit
MCVD
metal chemical vapor deposition
Md
mendelevium
MD
molecular dynamics
MDC
mechanical dry cycle
MD-MOS
multi-drain metal-oxide semiconductor
MDL
minimum detection limit; Master Deliverables List
MDQ
market driven quality
MDS
modify device status
MDU
modular dispensing unit
MEBS
medium energy backscattering spectrometry
MED
modeling for equipment design
MEM
Manufacturing Enterprise Model; Manufacturing Equipment Monitor
MERIE
magnetically enhanced reactive ion etching
MES
manufacturing execution systems
MESC
Modular Equipment Standards Committee (SEMI); Modular Equipment Sub-Committee for Communications (SEMI--after 1992)
MESFET
metal-semiconductor field effect transistor
METL
multielement two-layer
METS
Materials and Equipment Trading Service
MeV
megaelectrovolt
MFC
mass flow controller
MFM
mass flow meter
Mg
magnesium
MG
manufactured goods
MGC
manufactured goods collection
MGE
modulator generalized ellipsometry
MHI
material hazard index
MHz
megahertz
MIC
monolithic integrated circuit
MID
material ID
MIE
magnetron ion etching
MIM
metal-insulator-metal
MIMAC
measurement and improvement of manufacturing capacity
MIMD
management information of metrology data
MIMO
multi-input, multi-output
MIS
metal insulator silicon
MLCC
multilayer ceramic capacitors
MLL
modify lot location
MLM
multilevel metal
MLP
multi-layer perceptron
MLR
message log report
MLV
modify logging versions
MM
Manufacturing Methods
MMC
Manufacturing Methods Council
MMD
Microlithographic Mask Development program
MMIC
monolithic microwave integrated circuit
MMM
material movement management
MMMC
machine material movement component
MMMS
Material Movement Management Standard
MMO
multimodel optimization
MMOS
modified MOS
MMST
Microelectronics Manufacturing Science and Technology
Mn
manganese
MNOS
metal-nitride-oxide semiconductor
MNS
metal-nitride semiconductor
Mo
molybdenum
MO
metal-organic
MOCVD
metal-organic chemical vapor deposition
MOP
modify operating procedures
MOS
metal-oxide semiconductor
MOS-C
metal oxide semiconductor capacitor
MOSFET
metal-oxide semiconductor field effect transistor
mp
melting point
MP
massively parallel
MP-OES
multi-point optical emission spectroscopy
MPP
multiphase printing
MPRES
modular plasma reactor simulator
MPU
microprocessor unit
MPX
multiplex
MRP
materials requirements planning
MRP-II
manufacturing resource planning
MRS
Materials Research Society
MS
mass spectrometry; mass spectrometer; mass spectroscopy
MSB
most significant bit
MSDS
Material Safety Data Sheet
MSHA
Mine Safety and Health Administration
MSEM
Metrology Specific Equipment Model
MSG
Management Steering Group
MSI
medium-scale integration; manufacturing support item
MSID
mass spectrometer lead detector
MSL
modify system logging
MSLD
mass spectromenter leak detector
MSS
modify system state
MSTAB
Manufacturing Systems Technical Advisory Board
MTBA
mean time between assists
MTBAp
mean (productive) time between assists
MTBF
mean time between failures
MTBFp
mean (productive) time between failures
MTBI
mean time between interrupt; mean time between incident
MTOL
mean time off line; mean time on line
MTS
Material Tracking Standard
MTTA
mean time to assist
MTTC
mean time to correct
MTTF
mean time to failure
MTTR
mean time to repair
MUL
modify user login
MUP
modify user password
MV
megavolt
MVC
model view controller
MVTR
moisture vapor transmission rate
MW
molecular weight
MWBC
mean wafers between cleans
MWT
monitor wafer turner