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Glossary
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- La
- lanthanum
- LAMMA
- laser micro-mass analysis
- LAMMS
- laser micro-mass spectroscopy
- LAN
- local area network
- LANL
- Los Alamos National Laboratory
- LAR
- lot age report
- LC
- inductance-capacitance; liquid chromatography
- LCA
- life-cycle analysis
- LCC
- leaded chip carrier
- LCD
- liquid crystal display
- LCL
- lower confidence limit
- LDD
- lightly doped drain
- LDL
- lower detection limit
- LDP
- low density plasma
- LDPE
- low density polyethylene
- LEC
- liquid encapsulated Czochralski crystal
- LED
- light-emitting diode
- LEL
- lower explosive limit
- LF
- laminar flow
- LFL
- lower flammable limit
- LGQ
- linear Gaussian quadratic
- Li
- lithium
- LI
- laser interferometry
- LIC
- linear integrated circuit
- LID
- leadless inverted device
- LIDAR
- light detection and ranging technology
- LIFO
- last in, first out
- LIMA
- laser-induced mass analysis
- LIMS
- laser-induced mass spectrometry
- LIR
- location inventory report
- LKDM
- low k dielectric material
- LLCC
- leadless chip carrier
- LLD
- lower limit of detection
- LLM
- local linear models
- LLNL
- Lawrence Livermore National Laboratory
- LLNQ
- least lots next queue
- LLS
- localized light scatterer
- LM
- light microscope
- LMMA
- laser microprobe mass analysis
- LOC
- level of concern
- LOCOS
- local oxidation of silicon
- LOS
- loss of selectivity
- LPC
- linear predictive coding; laser particle counter; low particle concentration; liquid-borne particle counter
- LPCVD
- low-pressure chemical vapor deposition
- LPD
- light point defect
- LPE
- liquid phase epitaxy
- LPI
- low-pressure isolation
- LPSM
- Levenson phase shift mask
- LPV
- low-pressure vent
- Lr
- lawrencium
- LRP
- long range plan
- LRS
- laser Raman spectroscopy
- LSB
- least significant bit
- LSE
- latex sphere equivalent
- LSHI
- large-scale hybrid integration
- LSI
- large-scale integration
- LSM
- laser scanning microscope
- LTC
- lithographic test chip
- LTCVD
- low-temperature chemical vapor deposition
- LTL
- lot-to-lot
- LTO
- low-temperature oxidation (or oxide)
- LTPD
- lot tolerance percent defective
- LTV
- local thickness variation
- Lu
- lutetium
- LUW
- logical unit of work
- LV
- latent variable
- LVDT
- linear voltage differential transducer
- LVI
- low-voltage inverter
- LVS
- layout verification of schematic
- LWB
- Lithography Workbench
- LWR
- line width reduction
- LWS
- Large Wafer Study
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