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Glossary

I
iodine
I2L
integrated injector logic
I300I
International 300 mm Initiative
IC
integrated circuit; Investment Council; ion chromatography
ICAP
inductively-coupled argon-plasma spectrometry
ICCG
incomplete conjugate gradient
ICMS
integrated circuit measurement system
ICP
inductively-coupled plasma
ICP-AES
inductively-coupled plasma atomic emission spectroscopy
ICP-MS
inductively-coupled plasma mass spectrometry
ICT
ideal cycle time
IDEAL
initiating, diagnosing, establishing, acting, leveraging
IDDQ
direct drain quiescent current
IDL
interface definition language
IDLH
immediately dangerous to life or health
IDS
interactive diagnostic system
IEA
ion energy analysis
IEC
infused emitter coupling
IEDF
ion energy distribution function
IEEE
Institute of Electrical and Electronics Engineers
IERN
internal-external recurrent neural network
IF
interface
IGFET
insulated-gate field-effect transistor
IHT
ideal handler time
II
ion implant (also I2)
ILB
inner lead bond
ILD
interlevel dielectric; interlayer dielectric
ILS
intracavity laser spectroscopy
IM
integrated model
IMD
intermetal dielectric
IMMA
ion microphobe mass analysis
IMR
integrated model repository
IMS
ion mobility spectroscopy
In
indium
INCAMS
individual cassette manufacturing system
I/O
input/output
IPL
ion projection lithography
IPO
initial public offering
IPT
ideal process time
Ir
iridium
IR
infrared
IRAS
infrared reflection-absorption spectroscopy
IRIS
imaging of radicals interacting with surfaces
IRN
internal recurrent neural network
IRONMAN
Improving Reliability of New Machines at Night
IRTC-1
interconnect reliability test chip-1
IS
information systems; interface specifications; integrated systems
ISA
Instrumentation Society of America
ISC
Industry Steering Council
ISDN
integrated services digital network
ISM
inductor super magnetron
ISEM
inspection/review specific equipment model
ISDN
integrated services digital network
ISPM
in situ particle monitor
ISR
in situ rinse
ISS
ion scattering spectroscopy
ITRI
Interconnection technology Research Institute
IVP
integrated vacuum processing