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Glossary

H
hydrogen
HAP
hazardous air pollutant
HAST
highly accelerated stress testing
HAZCOM
Hazard Communication Standard
HB
horizontal Bridgeman crystal
HCI
hot carrier injection
HCMOS
high-density complementary metal-oxide semiconductor
HCS
hot-carrier suppressed
HD
high density
HDL
hardware description language
HDP
high density plasma
HDPE
high-density polyethylene
He
helium
HEPA
high-efficiency particulate air
Hf
hafnium
HF
hydrofluoric acid
HFRR
hydrofluoric acid reprocessor return system
Hg
mercury
HIBS
heavy ion backscattering spectrometry
HiPOx
high-pressure oxygen
HLF
horizontal laminar flow
HMDS
hexamethyldisilazane
HMIS
hazardous materials inventory statement
HMMP
hazardous materials management plan
HMOS
high-performance MOS; high-density MOS
Ho
holmium
HOMER
hazardous organic mass emission rate
HOPG
highly-oriented pyrolitic graphite
HP
high purity
HPCC
high performance computing and communicating
HPEM
Hybrid Plasma Equipment Model
HPI
high-pressure isolation
HPL
high performance logic
HPLC
high-performance liquid chromatography
HPM
hazardous production materials; high purity metal
HPV
high-pressure vent
HRA
human reliability analysis
HSMS
high speed message services
HTF
high temperature film
HTH
head-to-head
HTL
high-threshold logic
HTO
high-temperature oxidation
HTRB
high-temperature reverse bias
HTU
height of transfer unit
HUPW
hot ultrapure water
HVAC
heating, ventilating, and air conditioning
HY
hybrid