Glossary

Ga

gallium

GAC

granular activated carbon

GASAD

gate and source and drain

GC

gas chromatography; gravimetric calibrator

GCC

generic cell controller

GCD

gas chromatography distillation

GCMS

gas chromatography mass spectroscopy

Gd

gadolinium

GDS

graphical design system; graphical design software

Ge

germanium

GEM

Generic Equipment Model

GEMVS

GEM verification system

GES

generic equipment simulator

GFAAS

graphite furnace atomic absorption spectrometry/spectroscopy

GFC

gas filter correlation

GFCI

ground fault circuit interrupter

GILD

gas immersion laser doping

GLC

gas liquid chromatography

GOF

goodness of fitness

GOI

gate oxide integrity

GPIB

general-purpose interface bus

GSCE

gas source control equipment

GSPID

gain-scheduled proportional integro-differential

GTS

GEM Test System

GUI

graphical user interface

GWIM

global warming impact model