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Glossary
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- EAROM
- electrically alterable read-only memory
- EASE
- equipment and software emulator
- E-beam
- electron beam
- EBHT
- electron beam high throughput lithography
- EBIC
- electron beam-induced current
- EBR
- edge bead removal
- EC
- engineering change; equipment controller
- ECA
- engineering capability assessment
- ECAD
- electronic computer-aided design; engineering computer-aided design
- ECAE
- electronic computer-aided engineering
- ECL
- emitter coupled logic
- ECN
- engineering change notice
- ECO
- engineering change order
- ECQB
- electrochemical quartz crystal balance
- ECR
- electron cyclotron resonance
- EDA
- electronic design automation
- EDD
- earliest due date
- EDI
- electronic data interchange
- EDIF
- electronic design interchange format
- EDP
- electronic data processing
- EDS
- energy-dispersive spectroscopy
- EDU
- equipment dependent uptime
- EDX
- energy-dispersive X ray
- EDXA
- energy-dispersive X-ray analysis
- EEDF
- electron energy distribution function
- EELS
- electron energy-loss spectroscopy
- EEPROM
- electrically erasable programmable read only memory
- EFEM
- equipment front end module
- EFO
- electronic flame-off
- EFOCS
- evanescent fiber optic chemical sensors
- EFTIR
- emission Fourier transform infrared spectroscopy
- EFV
- excess flow valve
- EGE
- ethylene glycol ethers
- EHO
- estimated hourly output
- EHS
- extremely hazardous substances
- EI
- equipment integration
- EIA
- Electronic Industries Association
- EID
- Equipment Interface Development
- EIP
- Equipment Improvement Program; Equipment Improvement Project
- EIS
- electrochemical impedance spectroscopy
- EKF
- extended Kalman filter
- EL
- experience level
- ELF
- extremely low frequency
- EM
- enterprise model; electromagnetic; electromigration
- EMA
- equipment maturity assessment
- EMC
- electromagnetic capability; electromagnetic compatability
- EMF
- electromagnetic field
- EMG
- electromigration
- EMI
- electromagnetic interference
- EMMA
- electron microscopy and microanalysis
- EMO
- emergency off
- EMP
- electromagnetic pulse
- EMR
- enter move request
- EMU
- electromagnetic unit
- EOL
- electromagnetic unit
- EORM
- environmental and occupational risk
- EOS
- electrical overstress
- EOT
- End of Transfer
- EOY
- end of year
- EP
- extreme pressure; electropolish
- EPA
- Environmental Protection Agency
- EPL
- electron projection lithography
- EPO
- emergency power off
- EPR
- electron paramagnetic resonance
- EPROM
- electrically programmable read-only memory
- EPSS
- electronic performance support system
- EPT
- equipment performance tracking
- EQUIP C/I
- equipment control and integration
- EQUIP RTC
- equipment real-time control
- Er
- erbium
- ERAM
- equipment reliability, availability, and maintainability
- ERC
- equivalent release concentration
- ERD
- elastic recoil detection
- ERG
- enhancement and review group
- ERM
- enterprise reference model
- ERN
- external recurrent neural network
- ERP
- extended range pyrometer
- ERS
- event reporting standard
- ERT
- emergency response time
- Es
- einsteinium
- ES
- engineering specification; expert system
- ESC
- electrostatic chuck
- ESCA
- electron spectroscopy for chemical analysis
- ESD
- electrostatic discharge
- ESH
- Environment, Safety, and Health
- ESM
- electronic service manual
- ETAB
- Executive Technical Advisory Board
- ETQR
- External Total Quality and Reliability
- Eu
- europium
- EUV
- extreme ultraviolet
- eV
- electronvolt
- EVC
- equilibrium vapor concentration
- EWMA
- exponentially weighted moving average
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