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Glossary
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- C
- carbon
- C-to-C
- cassette-to-cassette
- Ca
- calcium
- CA
- CIM architecture
- CAA
- CIM applications architecture
- CAB
- Competitive Analysis Benchmarking
- CAD
- computer-aided design
- CADT
- control application development tool
- CAE
- computer-aided engineering
- CAF
- controlled ambient facility
- CAG
- Competitive Analysis Group
- CAI
- computer-assisted instruction
- CALS
- Computer-Aided Logistics Support (Air Force Program)
- CAM
- computer-aided manufacturing
- CAPS
- computer-assisted problem solving
- CAR
- computer-aided research
- CARRI
- computerized assessment of relative risk impacts
- CASE
- computer-aided software engineering; computer-aided systems engineering
- CAT
- computer-aided testing
- CAW
- Construction Analysis Workgroup
- CAWC
- cryogenic aerosol wafer cleaning
- Cb
- columbian
- CBGA
- ceramic ball grid array
- CBS
- chemical bottle storage area
- CBT
- computer-based training
- CC
- chip carrier; cluster controller
- CCC
- ceramic chip carrier
- CCD
- charge-coupled device
- CCSL
- compatible current-sinking logic
- CCW
- counter clockwise
- Cd
- cadmium
- CD
- critical dimension
- CDO
- controlled decomposition/oxidation
- CD/OL
- critical dimension overlay
- CDA
- clean dry air
- CDE
- chemical downstream etch
- CDEM
- Customer Delivery Enterprise Model
- CDI
- collector-diffusion isolation
- CDM
- Common Device Model for SAB
- CDR
- chemical distribution room
- CD-ROM
- compact disk read-only memory
- Ce
- cerium
- CE
- capillary electrophoresis
- CEC
- cell evaluation chip
- CEE
- control execution environment
- CEM
- continuous emissions monitoring
- CEPT
- COMETS Equipment Performance Tracking
- CER-DIP
- ceramic dual in-line package
- Cf
- californium
- CFA
- component failure analysis
- CFC
- chlorofluorocarbon
- CFD
- computational fluid dynamics
- CFI
- CAD Framework Initiative
- CFM
- contamination-free manufacturing
- CFMRC
- Contamination-Free Manufacturing Research Center
- CGA
- Compressed Gas Association
- CHR
- communication history report
- CI
- confidence interval
- CIC
- cleanroom interface chamber
- CID
- charge-injection device
- CIE
- computer-integrated engineering
- CIM
- computer-integrated manufacturing
- CIM-OSA
- computer-integrated manufacturing-open systems architecture (ESPRIT
program)
- CIP
- Continuous Improvement Program
- CIS
- Center for Integrated Systems
- CISC
- complex instruction set computer
- Cl
- chlorine
- CLC
- cancel lot cycle
- CLCC
- ceramic leaded chip carrier
- CLIC
- closed-loop intensity control
- Cm
- curium
- CM
- configuration management; cassette module
- CMC
- cassette module controller
- CML
- current mode logic
- CMM
- capability maturity model
- CMOS
- complementary metal-oxide semiconductor
- CMP
- chemical mechanical polishing
- CMR
- common-mode rejection ratio; cancel move request
- CMS
- coordinate measuring system
- CMUG
- Cost Modeling Users Group
- CNC
- computer numerical control; condensation nucleus counter
- CNS
- central nervous system
- Co
- cobalt
- COB
- chip-on-board
- COC
- cost of consumables
- CODEC
- coder-decoder
- COGS
- cost of goods sold
- COED
- computer optimized experimental design
- COO
- chief operating officer; cost of ownership
- COOL
- Cost of Ownership Luminator (Wright, Williams, & Kelly)
- CORBA
- common object request broker architecture
- CORE
- composite object reference
- COSS
- common object services specification
- COT
- customer-owned tooling
- CoV
- coefficient of variance
- Cp
- process capability
- CP
- chip place
- CPD
- concurrent product development
- Cpk
- process capability index
- CP/M
- computer program/maintenance
- CPE
- communications, participation, and education program
- CPGA
- ceramic pin grid array
- CPU
- central processing unit
- CQFP
- ceramic quad flat pack
- CQN
- closed-queuing network
- Cr
- chromium
- CRADA
- cooperative research and development agreement
- CRC
- cyclic redundancy check
- CRM
- cost/resource model
- CRT
- cathode ray tube
- Cs
- cesium
- CSA
- CIM systems architecture
- CSE
- control systems engineering department
- CSF
- critical success factor
- CSL
- current-steering logic
- CSMA/CD
- carrier-sense, multiple-access/collision detection
- CSP
- chip scale package
- CSPED
- concurrent semiconductor production and equipment development
- CST
- CIM systems technology
- CSTR
- continuous stirred tank reactor
- CSV
- comma-separated variable
- CT
- cycle time
- CTC
- cluster tool controller
- CTE
- coefficient of thermal expansion
- CTI
- cycle time improvement
- CTL
- complementary transistor logic
- CTMC
- cluster tool modular communications
- Cu
- copper
- CUB
- central utility building
- CUBES
- capacity utilization bottleneck efficiency system
- CUI
- common user interface
- CUSUM
- cumulative sum
- CV
- capacitance-to-voltage
- CVC
- chemical vapor cleaning
- CVCM
- collected volatile condensable materials
- CVD
- chemical vapor deposition
- CW
- continuous wave; clockwise
- CYM
- cycle model
- Cz
- Czochralski process
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