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Glossary
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- AA
- atomic absorption
- AAS
- atomic absorption spectroscopy
- AAS/GFAAS
- atomic absorption spectroscopy/graphite furnace atomic absorption
spectroscopy
- ABC
- activity-based costing
- ABM
- activity-based management
- ABS
- antilock braking system
- Ac
- actinum
- AC
- alternating current; activated carbon
- ACCESS
- analysis computer for component engineering services support
- ACI
- after clean inspection
- ACT
- alternative control techniques; actual cycle time
- A/D
- analog to digital
- ADC
- analog-to-digital converter
- ADE
- advanced development environment
- ADI
- after develop inspection
- ADIG
- Application Development Interface Guidelines
- ADIO
- analog/digital input/output
- ADL
- add lot
- ADP
- administrative data processing
- ADT
- applied diagnostic techniques
- AE
- atomic emission; acoustic emission; absolute ellipsometry
- AEC
- Advanced Equipment Controller
- AECS
- Advanced Equipment Control System; Automated Equipment Control System
- AEI
- after etch inspection; automated equipment interface
- AEM
- analytical electron microscopy
- AES
- Auger emission spectroscopy; Auger electron spectroscopy
- AFD
- application framework definition
- AFM
- atomic force microscopy
- Ag
- silver
- A-GEMTF
- Advanced GEM Task Force
- AGV
- automated guided vehicle
- AHF
- anhydrous hydrogen flouride
- AHU
- air handling unit
- AI
- artificial intelligence
- Al
- aluminum
- ALE
- atomic layer epitaxy; application logic element
- ALS
- advanced light source; advanced low-power Schottky
- Alt
- alternating
- ALU
- arithmetic logic unit
- Am
- americium
- AMC
- airborne molecular contamination
- AMH
- automated material handling
- AMHS
- automated material handling systems
- AML
- automatic model linking
- AMT
- advanced manufacturing technology
- AMU
- atomic mass unit
- ANN
- artificial neural network
- ANOVA
- analysis of variance
- ANSI
- American National Standards Institute
- AOQL
- average outgoing quality level
- AOV
- air-operated valve
- AP
- adhesion promoter
- APA
- advanced performance algorithm
- APC
- advanced process control
- APCD
- add-on pollution control devices
- APCFI
- Advanced Process Control Framework Initiative
- APCVD
- atmospheric pressure chemical vapor deposition
- APEC
- advanced process equipment control
- API
- application programming interface; atmospheric pressure ionization
- APIMS
- atmospheric pressure ionization mass spectroscopy
- APM
- atmospheric passivation module; acoustic plate mode
- APT
- advanced probe technology
- AQ
- administrative quality
- AQI
- ACCESS query interface
- AQL
- acceptance quality level: acceptable quality level
- AQTX
- aquatic toxicity
- Ar
- argon
- AR
- aspect ratio
- ARAMS
- Automated Reliability, Availability, and Maintainability Standard
- ARC
- antireflective coating
- ARDE
- aspect-ratio-dependent etching
- ARIMA
- auto regressive moving average with integration
- ARO
- after reciept of order
- ARPA
- Advanced Research Projects Agency (formerly DARPA)
- ARS
- angle-resolved scattering
- As
- arsenic
- ASAP
- Advanced Stepper Application Program; as soon as possible
- ASIC
- application-specific integrated circuit
- ASME
- American Society for Mechanical Engineering
- ASO
- automatic shutoff
- ASP
- advanced strip and passivation; advanced strip processor
- ASR
- automated send receive
- AS/RS
- automated storage and retrieval system
- ASTM
- American Society for Testing and Materials
- At
- astatine
- ATDF
- Advanced Tool Development Facility
- ATDSEM
- Apply/Develop Track Specific Equipment Model
- ATE
- automatic test equipment
- ATF
- Automation Test Facility (recently renamed SIL)
- ATG
- automatic test generation
- ATLAS
- abbreviated test language for all systems
- atm
- atmosphere
- ATP
- advanced technology program; adenosine triphosphate; acceptance and tool
performance
- ATPG
- automatic test pattern generation
- ATR
- attenuated total reflectance
- Att
- attenuated
- ATR-FTIR
- attenuated total reflectance Fourier transform infrared spectroscopy
- Au
- gold
- AVP
- advanced vertical processor
- AVS
- advanced visualization system
- AWE
- asymptotic waveform evaluation
- AWS
- advanced wet station
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