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Glossary

AA
atomic absorption
AAS
atomic absorption spectroscopy
AAS/GFAAS
atomic absorption spectroscopy/graphite furnace atomic absorption spectroscopy
ABC
activity-based costing
ABM
activity-based management
ABS
antilock braking system
Ac
actinum
AC
alternating current; activated carbon
ACCESS
analysis computer for component engineering services support
ACI
after clean inspection
ACT
alternative control techniques; actual cycle time
A/D
analog to digital
ADC
analog-to-digital converter
ADE
advanced development environment
ADI
after develop inspection
ADIG
Application Development Interface Guidelines
ADIO
analog/digital input/output
ADL
add lot
ADP
administrative data processing
ADT
applied diagnostic techniques
AE
atomic emission; acoustic emission; absolute ellipsometry
AEC
Advanced Equipment Controller
AECS
Advanced Equipment Control System; Automated Equipment Control System
AEI
after etch inspection; automated equipment interface
AEM
analytical electron microscopy
AES
Auger emission spectroscopy; Auger electron spectroscopy
AFD
application framework definition
AFM
atomic force microscopy
Ag
silver
A-GEMTF
Advanced GEM Task Force
AGV
automated guided vehicle
AHF
anhydrous hydrogen flouride
AHU
air handling unit
AI
artificial intelligence
Al
aluminum
ALE
atomic layer epitaxy; application logic element
ALS
advanced light source; advanced low-power Schottky
Alt
alternating
ALU
arithmetic logic unit
Am
americium
AMC
airborne molecular contamination
AMH
automated material handling
AMHS
automated material handling systems
AML
automatic model linking
AMT
advanced manufacturing technology
AMU
atomic mass unit
ANN
artificial neural network
ANOVA
analysis of variance
ANSI
American National Standards Institute
AOQL
average outgoing quality level
AOV
air-operated valve
AP
adhesion promoter
APA
advanced performance algorithm
APC
advanced process control
APCD
add-on pollution control devices
APCFI
Advanced Process Control Framework Initiative
APCVD
atmospheric pressure chemical vapor deposition
APEC
advanced process equipment control
API
application programming interface; atmospheric pressure ionization
APIMS
atmospheric pressure ionization mass spectroscopy
APM
atmospheric passivation module; acoustic plate mode
APT
advanced probe technology
AQ
administrative quality
AQI
ACCESS query interface
AQL
acceptance quality level: acceptable quality level
AQTX
aquatic toxicity
Ar
argon
AR
aspect ratio
ARAMS
Automated Reliability, Availability, and Maintainability Standard
ARC
antireflective coating
ARDE
aspect-ratio-dependent etching
ARIMA
auto regressive moving average with integration
ARO
after reciept of order
ARPA
Advanced Research Projects Agency (formerly DARPA)
ARS
angle-resolved scattering
As
arsenic
ASAP
Advanced Stepper Application Program; as soon as possible
ASIC
application-specific integrated circuit
ASME
American Society for Mechanical Engineering
ASO
automatic shutoff
ASP
advanced strip and passivation; advanced strip processor
ASR
automated send receive
AS/RS
automated storage and retrieval system
ASTM
American Society for Testing and Materials
At
astatine
ATDF
Advanced Tool Development Facility
ATDSEM
Apply/Develop Track Specific Equipment Model
ATE
automatic test equipment
ATF
Automation Test Facility (recently renamed SIL)
ATG
automatic test generation
ATLAS
abbreviated test language for all systems
atm
atmosphere
ATP
advanced technology program; adenosine triphosphate; acceptance and tool performance
ATPG
automatic test pattern generation
ATR
attenuated total reflectance
Att
attenuated
ATR-FTIR
attenuated total reflectance Fourier transform infrared spectroscopy
Au
gold
AVP
advanced vertical processor
AVS
advanced visualization system
AWE
asymptotic waveform evaluation
AWS
advanced wet station